Hitachi FineSAT II Series: FS100/FS200/FS300

Product Classification: High speed Scanning Acoustic Tomograph (SAT)

Product Description: Hitachi's state-of-the-art SAT series, awarded with more than 6 US patents.

Product Applications: Ultrafine acoustic inspection of semiconductor devices including stacked die, system-in-package, SOI, MEMS, MLCCs etc.

Product Highlights:

• Maximum Scanning Speed: 1000 mm/sec
• High Definition Imaging: 67 Mega-pixel (8192 x 8192 pixels), 0.5mm resolution
• System Bandwidth: Matches up to 500MHz
• Available Probes : a partial list from 75 different probes HITACHI offered!
  • 300MHz (ZnO)
  • 200MHz (ZnO), selectable focal lengths 5.2 mm to 8.1 mm
  • 140MHz (ZnO), selectable focal lengths
  • 85MHz (ZnO)  long focal length for encapsulated packages
  • 75MHz and below (Ceramics)
• Features and Options
  • Automatic Probe Recognition
  • One click image acquisition with S-Image feature
  • Easy Recipe retrieval with Image Index
  • 3D Volumemetric Scan
  • Grid-Scan Mode for production
  • Through-transmission and Non-immersion scanning
  • Short Time FFT analysis and bounded image reconstruction
  • Stacked-Die analysis software
  • Easy Waveform Capture and Quick Report Preparation
• Auto Tank Lifter Option
• MLCC dedicated configurations available!
• Auto loader option available for product wafers or JEDEC trays!
• Ask about giant scan area systems for samples up to 15 ft.

Additional Information:

Download technical paper on HITACHI advanced ZnO Probes as reprinted from Chip Scale Review 2007 issue.

Click here for a gallery of images generated with FineSAT technology!

Click here for an introduction to Ultrasonic Inspection with many sample application images. (6.7MB, right-click to save) Click here for the FineSAT Series brochure. (Adobe Acrobat Reader required)

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